Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning
Electronics Letters（2011）
Abstract
For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74 nm in the range of 1.55 μm and a wavelength tuning speed of ~200 kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiOx and SiNy depo...
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Key words
dielectric materials,laser tuning,micromachining,plasma CVD,silicon compounds,surface emitting lasers
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