Experimental investigations into the formation of nanocrystal silicon thin film synthesized at low substrate temperature
Superlattices and Microstructures（2014）
Abstract
•As opposed to nucleation in the film, nc-Sis crystallization formed in the plasma.•Surface composition of nc-Sis synthesized at different powers has been studied.•The nc-Si films show obvious phase separation without high-temperature annealing.
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Key words
Nanocrystal silicon,Photoluminescence,Fourier transform infrared spectroscopy,Oxidation
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