Preparation and Characterization of Sulfurized Tungsten Doped Non-hydrogenated Diamond-Like Carbon Films

A tungsten doped non-hydrogenated diamond-like carbon (W-DLC) film was prepared by ion beam assisted deposition, and then W-DLC film was sulfurized by low temperature ion sulfurization. The structural analyses were performed on the scanning electron microscope, optical profilometer, Raman spectroscope and transmission electron microscope equipped with energy dispersive spectroscope. The results showed that the low temperature ion sulfurization treatment increase I D /I G ratio from 3.5 to 4.0 and 3.4 to 3.8 for sulfurized DLC and W-DLC films, respectively. The microstructures of sulfurized DLC film changed from amorphous to nanocrystalline/amorphous structure after low temperature ion sulfuration. The sulfurized W-DLC film was composed of nanocrystallites β-WC 1−X , WS 2 and FeS, which uniformly dispersed in the amorphous DLC matrix.