Orientation Dependent Dielectric Characteristics of Nanocrystalline Pb(ZrxTi1-x)O3 Films with Inter Digital Electrodes

Crystal structure and dielectric properties of nanocrystalline Pb(ZrxTi1-x)O3 films were studied. Intensity of Raman mode E(1LO) was increased and peak around 580 cm-1 became symmetric and strong (110) crystal plane reflection was observed as the thickness of the films increased from 150 nm to 500 nm. Curie-temperature was found to decrease from 370 degrees C to 345 degrees C as the orientation changed from tetragonal to trigonal. Dielectric constant was found to be maximized and loss angle minimized for single phase oriented films, while phase co-existence was found to increase loss angle values, and bimodal dielectric maxima were found.