HfO_2薄膜成長過程の分光エリプソメトリによるその場観察と第一原理計算との比較(ゲート絶縁膜, 容量膜, 機能膜及びメモリ技術)
openalex
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined
openalex