Investigation of the Program Operation of NAND Flash Cells With a Single-Electron Resolution

This paper exploits the possibility of monitoring the floating-gate (FG) charge of state-of-the-art NAND Flash arrays with a single-electron resolution to investigate in detail the program operation and some previously inaccessible technological parameters. In particular, the analysis leads to the assessment of the statistical distribution of the FG to control-gate capacitance and of the leakage c...