SOI slot photonic crystal cavities on SiO2 from ?? = 1.3 ??m to 1.6 ??m
Opto-Electronics and Communications Conference(2015)
摘要
Slot photonic crystal cavities are of great interest for their advantages of small footprint as well as pretty high quality factors and large (Q/V) factors. A series of slot photonic crystal heterostructure cavities with resonant wavelengths in the range 1.3 ??m - 1.6 ??m has been designed and fabricated with Q of tens of 10000 and (Q/V) reaching 800 000. These works open perspectives for on-chip nonlinear optics and biosensing.
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关键词
Photonic crystal cavities,silicon photonics
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