JMEMS Letters Actuation Dependency of Frequency Tuning in MEMS ResonatorsYunqi Cao,David Hernandez-Escobar,Carl Boehlert,Nelson SepulvedaIEEE/ASME Journal of Microelectromechanical Systems(2020)引用 0|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要