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Quantitative Nanoscale Imaging of Lattice Distortions in Epitaxial Semiconductor Heterostructures Using Nanofocused X-ray Bragg Projection Ptychography.

S. O. Hruszkewycz,M. V. Holt,C. E. Murray,J. Bruley,J. Holt, A. Tripathi,O. G. Shpyrko,I. McNulty,M. J. Highland,P. H. Fuoss

Nano Letters（2012）

引用 88|浏览9
关键词
Bragg projection ptychography,strain imaging,coherent X-ray diffraction imaging,silicon-on-insulator devices,SiGe heteroepitaxy
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