Failure Case Studies of GaAs-Based Oxide-Confined VCSELs

Kuang-Tse Ho, Ching-Hsiang Chan

International Symposium for Testing and Failure AnalysisISTFA 2020: Papers Accepted for the Planned 46th International Symposium for Testing and Failure Analysis（2020）

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摘要

Abstract This research summarizes a variety of physical failure modes of GaAs-based oxide-confined VCSELs and their root causes. Standard failure analysis procedure, which includes defect fault isolation by PEM or IR-OBIRCH and physical inspection by TEM analysis are also presented in detail.

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关键词

vcsels,gaas-based,oxide-confined

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