Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm.

The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (10-20 mu m) is demonstrated. These waveguides are constituted of a several micrometer thick Te82Ge18 film deposited onto a Te75Ge15Ga10 bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF3/O-2/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry. (C) 2011 Optical Society of America