Method of depositing a diffusion barrier layer which provides an improved interconnectPeijun Ding,Zheng Xu,Hong Zhang,Xianmin Tang,Praburam Gopalraja,Suraj Rengarajan,John Forster,Jianming Fu,Tony Chiang,Gongda Yao,Fusen E Chen,Barry L Chin,Gene Y Koharamag(2009)引用 23|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要