Integration of Silicon Photonics into DRAM Process

D. J. Shin, K. S. Cho,H. -C. Ji,B. S. Lee,S. G. Kim,J. K. Bok, S. H. Choi,Y. H. Shin, J. H. Kim,S. Y. Lee,K. Y. Cho,B. J. Kuh,J. H. Shin,J. S. Lim,J. M. Kim,H. M. Choi,K. H. Ha,Y. D. Park,C. H. Chung

Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013（2013）

Cited 17|Views18

Key words

DRAM chips,diffraction gratings,electro-optical modulation,elemental semiconductors,integrated optics,integrated optoelectronics,optical couplers,optical waveguides,photodiodes,silicon,DRAM process,Si,bit rate 10 Gbit/s,electro-photonic circuit,grating coupler,modulator,photodiode,silicon photonics,size 65 nm,waveguide

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