Diffusion along triple junctions is this the pathway for narrow Cu conductor lines?
Integrated Reliability Workshop Final Report（2012）
Abstract
The possibility that the major mass transport pathway in very thin small dimension metallic nanoconductors is explored theoretically. It is seen that if we consider the triple junctions of the grain boundary intersecting with the cap and/or the liner the observations can be accounted for and that the grain boundary is never an important pathway.
MoreTranslated text
Key words
copper,diffusion,grain boundaries,semiconductor junctions,cu,grain boundary intersection,mass transport pathway,narrow conductor lines,small dimension metallic nanoconductors,triple junctions
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined