Global parameter extraction for a multi-gate MOSFETs compact model

Microelectronic Test Structures(2010)

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摘要
A global I-V parameter extraction methodology for multi-gate MOSFET compact model is presented for the first time. New L-dependent properties are proposed to enable the accurate modeling of transistors over a wide range of gate length using a single set of model parameters. The results are verified with FinFET experimental data with effective channel lengths from 30nm to 10um. For both n and p type devices, excellent agreement between the data and the model has been demonstrated.
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关键词
mosfet,semiconductor device models,finfet,l-dependent properties,channel lengths,gate length,global i-v parameter extraction,multigate mosfet compact model,bsim-cmg,global extraction,multi-gate,fitting,length measurement,mathematical model,logic gates,parasitic capacitance,data models,surface resistance,circuits,data mining,degradation
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