Positioning sensor with nanometric performances over centimetric range for nanotechnology sample-holders

Nowadays, nanometer resolution and accuracy in many nanotechnology processes are required. But accuracy is in general opposed with range. High resolution over a wide range has been made possible using interferometric translation stages, in other words by combining metrology with classical mechanical motions. The interferometry is obviously a good solution. Nevertheless, its sensitivity to the medium index its price make it prohibited in many applications. In parallel of several works on interferometry, a lot of studies have been started to develop simple sensors or measurement systems gathering simplicity, high resolution over long range and low price potentialities [1-7]. We developed an optical sensor for centimeter range measurements with nanometric resolution. Simulation and modeling can be found in [8]. Here, the principle is detailed and experimental results are pointed out according to modeling results. We plan to use this sensor with a nano-displacement platform nano-manipulation and for a sample-holder in microscopy or lithography process.