Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

Jose Pozo,W J Westerveld,P J Harmsma,Sehyun Yang,P Bodis,R A Nieuwland, M Lagioia,D M R Lo Cascio,Johnpaul Staats,R Schmits,Hans Van Den Berg,E Tabak, K D Green,H P Urbach,L K Cheng,M Yousefi

Transparent Optical Networks（2011）

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摘要

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.

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关键词

integrated optics,optical sensors,pressure sensors,silicon-on-insulator,strain sensors,mass production compatible sensing units,on-chip sensing,ring resonators,silicon on insulator photonic integrated sensors,3×3 interferometer,soi,harsh environments,on chip interrogation,photonic sensing,pressure sensor,strain sensor,ultrasound sensor,strain,physics,ultrasound,mass production,optical waveguides,photonics,silicon on insulator,chip

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