PH measurements with ZvO based Surface Acoustic Wave Resonator

Ruya Tang,Xiaotun Qiu,Jonathan J H Zhu,Jonathon Oiler,Hongzhan Huang, Huei Wang, Herbert Yu

Solid-State Sensors, Actuators and Microsystems Conference（2011）

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摘要

This paper investigated pH measurements using ZnO based Surface Acoustic Wave Resonator (SAW). The resonant frequency of the SAW decreased as pH changed from 7 to 2 (acid region) or from 7 to 12 (alkaline region). The detection limits were 0.03 and 0.02 pH change, respectively, which were comparable to commercial pH meters. The interaction between hydronium (H3O+) or hydroxide (OH-) and ZnO was proposed to be responsible for the frequency drop. Both hydronium and hydroxide can increase the conductivity of the ZnO film, resulting in the resonant frequency decrease due to the acoustoelectric effect.

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关键词

ii-vi semiconductors,chemical sensors,ph measurement,surface acoustic wave resonators,zinc compounds,ph measurements,zno,acoustoelectric effect,resonant frequency,surface acoustic wave resonator,ph,films,detection limit,surface acoustic wave,zinc oxide,sensors

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