Terahertz microsensor for biomedical applications

Matteo Perenzoni,Daniele Perenzoni,David Stoppa,Viviana Mulloni,Francesco Solazzi,Giuseppe Resta,Benno Margesin

Parma（2011）

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摘要

A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.

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关键词

cmos integrated circuits,biomems,biomedical electronics,biomedical equipment,microfabrication,microsensors,readout electronics,antenna-coupled microbolometer,biasing,biomedical applications,custom mems technology,detector,device level reference sensor,electrical measurements,electronic time-correlation,integrated circuit,low-cost integrated microsensor,pulsed sources,readout,standard cmos technology,bolometers,detectors,terahertz,antennas,fabrication,integrated circuits

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