Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology
Lasers and Electro-Optics Europe（2011）
Abstract
We are the first to present experimental results and understanding of the effects of an applied strain S in the effective index ne in a SOI-PIC. We fabricated a set of long racetrack-shaped ring resonators (length 1040 μm, bend radius 25 μm, circumference l), oriented along the [110] crystalline direction, consisting of a waveguide with dimensions of 1000 x 300 nm. Having a long racetrack enables us to neglect the effects of the bends. We excite the fundamental TM mode using a multimode interference (MMI) coupler.
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Key words
integrated optics,light interference,micro-optomechanical devices,micromechanical resonators,optical couplers,optical resonators,optical waveguides,refractive index,silicon-on-insulator,strain measurement,si,applied strain,bend radius,effective index,fundamental tm mode,microresonators,multimode interference coupler,optical properties,racetrack-shaped ring resonators,radius 25 mum,silicon-on-insulator technology,size 1000 mum,cmos technology,optics,waveguides,strain gauge,photonic integrated circuits,modal dispersion,quantum electronics,physics,cmos integrated circuits,indexes,electron optics,silicon on insulator
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