Characterization of a single port aluminum nitride tuning fork
Ultrasonics Symposium（2010）
Abstract
In this study the characterization of an aluminum nitride (A1N) double ended tuning fork (DETF) fabricated on a layer of silicon dioxide (SiO2) is presented. The positive temperature coefficients of SiO2 are used to achieve zero TCF for radio frequency (RF) Lamb wave resonators. This paper shows the possibility to integrate temperature compensated Lamb wave resonators with DETF-based devices on a single chip. The DETF resonates in a quasi-in-plane mode shape with a Q-factor of 578 in air and 3028 in vacuum. Through a laser Doppler velocity (LDV) measurement we also show that, due to the biomorph nature of the structure and the angle of the side walls, the motion of each tine of the DETF is a combination of in-plane bending, out-of-plane bending and torsional motion around the beam main axis.
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Key words
q-factor,acoustic resonance,acoustic resonators,aluminium compounds,bending,micromechanical devices,micromechanics,silicon compounds,surface acoustic wave devices,surface acoustic waves,torsion,vibrations,aln,detf based devices,detf resonance,ldv measurement,sio2,beam main axis,biomorph structure,double ended tuning fork,in plane bending,laser doppler velocity measurement,out of plane bending,positive temperature coefficients,quasi-in plane mode shape,radiofrequency lamb wave resonators,side wall angle,silicon dioxide layer,single port aluminum nitride tuning fork,temperature compensated lamb wave resonators,torsional motion,tuning fork characterization,zero tcf,aluminum nitride,lamb wave resonator,resonant frequency,shape,electrodes,chip,radio frequency,lamb wave,positive temperature coefficient,q factor
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