Performance enhancement in quantum well infrared photodetector utilizing the grating structure

Minglun Lee,Chengju Hsieh,Yaohong You,Vincent Su,Pohsun Chen,Hungchou Lin,Hanbo Yang,Hungming Chen,Chiehhsiung Kuan

Lasers and Electro-Optics（2013）

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摘要

We fabricate four different size grating structure on the top of the quantum well infrared photodetectors, then etch them into four different etching depth. With suitable design, the peak responsivity of the QWIPs is about thirteen times larger than that of the conventional QWIP.

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关键词

diffraction gratings,etching,infrared detectors,optical design techniques,optical fabrication,photodetectors,quantum well devices,conventional qwip,etching depth,grating structure fabrication,peak responsivity,performance enhancement,photodector design,quantum well infrared photodetector,gallium arsenide,scanning electron microscopy

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