Characterization Of Nanolaminate Thickness Using Multi-Parametric Surface Plasmon Resonance
Manipulation, Manufacturing and Measurement the Nanoscale(2013)
Abstract
Nanolaminates play a significant role in the precision optical components, and protective barrier coatings. We present a new non-destructive method for characterization of nanolaminates in terms of thickness and refractive index based on Multi-Parametric Surface Plasmon Resonance (MP-SPR). In this paper, we briefly compare novel MP-SPR technology and traditional ellipsometry approach and then show MP-SPR on three examples that would be difficult-to-measure with ellipsometry. In the first case, MP-SPR is used to measure thickness of Langmuir-Blodgett multilayer film of Cr-Au-SACd, where each SACd layer can be measured individually without averaging. In the second case, vacuum deposited Cr-Au-TaC (tetragonal amorphous carbon) is measured. In the third case, alternating nanolayers of Al2O3-Pt deposited by Atomic Layer Deposition are measured. This shows that Multi-Parametric Surface Plasmon Resonance (MP-SPR) overcomes drawbacks of traditional optical methods and enables measurements of metal (light absorbing) nanolaminates and of ultrathin nanolayers.
MoreTranslated text
Key words
multi-parametric surface plasmon resonance,refractive index,thickness,thin film deposition,absorbing film,nanolaminate,SPR,characterization,ellipsometry,Langmuir-Blodgett,ALD,CVD
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined