Development of radio-opaque silicon micro needles for medical diagnostics

Lim Ruiqi,Nandar Su,Jayakrishnan Chandrappan,Shao Qiang Tang,Kripesh Vaidyanathan,Ranganathan Nagarajan

Electronics Packaging Technology Conference（2010）

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摘要

In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 μm to 100μm are fabricated in silicon using a three step mask process. A backside cavity is generated under DRIE for filling the radiopaque material. Barium sulphate is filled in and a biocompatible sealing is provided to hold the radiopaque material inside. The fabricated needles provide a better contrast enhancement under x-ray imaging.

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关键词

biological tissues,biomedical equipment,biomedical materials,elemental semiconductors,needles,silicon,drie,si,x-ray imaging,barium sulphate,biocompatible sealing,cylindrical shaped microneedles,medical diagnostics,radio-opaque silicon microneedles,radiopaque material,step mask process,tissue labeling applications,resists,barium

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