Fabrication of electrically-pumped resonance-cavity membrane-reflector surface-emitters on silicon

Wenjuan Fan,Deyin Zhao,Santhad Chuwongin,Junghun Seo,Hongjun Yang,Jesper Berggren,Mattias Hammar,Zhenqiang Ma,Weidong Zhou

Photonics Conference（2013）

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摘要

Various lasers and light sources on Si via heterogeneous integration of Si/III-V have been reported based on direct growth on Si or wafer bonding technology. We reported earlier optically-pumped Si membrane-reflector vertical-cavity surface-emitting lasers (MRVCSELs) fabricated by low-temperature membrane transfer printing processes. Here we report electrically-pumped devices based on an intra-cavity contact configuration.

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关键词

iii-v semiconductors,elemental semiconductors,integrated optoelectronics,laser cavity resonators,optical elements,optical fabrication,optical pumping,printing,quantum well lasers,silicon,surface emitting lasers,wafer bonding,mr-vcsel,si,si-iii-v heterogeneous integration,electrically-pumped resonance-cavity membrane-reflector surface-emitters,intracavity contact configuration,light sources,low-temperature membrane transfer printing,optically-pumped membrane-reflector vertical-cavity surface-emitting lasers

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