A novel approach to RF MEMS device- and system-level simulation based on MEMS+ and Matlab-Simulink

Pagazani, J.,Mehdaoui, A.,Lissorgues, G.,Schropfer, G.

Design, Test, Integration and Packaging of MEMS/MOEMS（2013）

Cited 23|Views5

No score

Abstract

The aim of this work is to model a novel tuneable RF capacitor based on a gyroscope-like complex geometry using a new design platform based on component library MEMS+. This modelling approach allows detailed and accurate device simulation as well as rapid system-level simulation through an automatic transfer into general system software, namely Matlab/Simulink.

Translated text

Key words

capacitors,gyroscopes,micromechanical devices,matlab-simulink,rf mems device,automatic transfer,component library mems+,general system software,gyroscope-like complex geometry,system-level simulation,tuneable rf capacitor,mems modelling,rf mems,micro-fabrication,system level simulation,tunable capacitor,finite element analysis,mathematical model,radio frequency

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined