Pulsed laser deposited-PZT based MEMS energy harvesting devices

M Jambunathan,R Elfrink,Ruud J M Vullers,Rob Van Schaijk,Matthijn Dekkers, Joska Broekmaat

Applications of Ferroelectrics held jointly with 2012 European Conference the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials（2012）

引用 10|浏览3

暂无评分

摘要

PZT thin films are a huge attraction in the rapid growing MEMS field, especially in the field of energy harvesting. This paper describes the PLD deposited PZT thin film growth and its integration into MEMS energy harvesting devices. We have shown a maximum power output of 51 μW with 63.6 μW/g2 sensitivity for a sinusoidal input excitation. The potential applications of these vibrational harvesters in car tires are explored by applying a shock input excitation.

查看译文

关键词

dielectric thin films,energy harvesting,lead compounds,micromechanical devices,piezoelectric devices,pulsed laser deposition,vibrational modes,pzt,pzt thin films,power output,pulsed laser deposited-pzt based mems energy harvesting devices,shock input excitation,vibrational harvesters,shock excitation,vibrational energy harevsting,films,resonant frequency,tires,acceleration

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要