Effect of the Substrates on Mechanical and Electrical Properties of Pb(Zr(0.52)Ti(0.48))O(3) Thin Films for Mems Applications
ISAF 2009 18TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS（2009）
关键词
Young's modulus,crystal orientation,dielectric hysteresis,dielectric polarisation,dielectric thin films,lead compounds,micromechanical devices,nanoindentation,pyrolysis,silicon compounds,sol-gel processing,MEMS,P-E hysteresis loops,PZT,SiNx,SiO2,Young's modulus,chelating agent,continuous stiffness measurement technique,crystallographic orientations,electrical properties,mechanical properties,nanoindentation,platinized silicon substrates,pyrolysis temperature,remanent polarization,sol-gel method,thin films
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