Process control & integration options of RMG technology for aggressively scaled devices

We report on aggressively scaled RMG-HKL devices, with tight low-VT distributions [σ(VTsat) ~ 29mV (PMOS), ~ 49mV (NMOS) at Lgate~35nm] achieved through controlled EWF-metal alloying for NMOS, and providing an in-depth overview of its enabling features: 1) physical mechanisms, model supported by TCAD simulations and analysis techniques such as TEM, EDS; 2) process optimizations implementation: oxygen sources reduction, control of RF-PVD TiAl/TiN ratio and reduced Hgate, also impacting stress induced in the channel. Additional key features: 1) Al vs. W as fill-metal, with careful liner/barrier materials selection and tuning yielding well-behaved devices with tight Rgate distributions down to Lgate~20nm, and enabling both PMOS and NMOS low-VT values for high aspect-ratio gates (Hgate~60nm, Lgate≥30nm); 2) wet-etch vs. siconi clean for dummy-dielectric removal, with HfO2 post-deposition N2-anneal resulting in substantial BTI improvement without EOT or low-field/peak mobility penalty, and good noise response.