High-Quality Integrated Inductors Based on Multilayered Meta-Conductors
Microwave and Wireless Components Letters, IEEE(2012)
摘要
We demonstrate high-quality integrated inductors built from a multilayer of alternating copper and ferromagnetic films. The multilayer acts as a meta-conductor whose effective permeability becomes nearly zero at its ferromagnetic anti-resonance frequency. This leads to a suppression of the skin effect and a significant increase in the quality factor of the device. Experiments show an up to 86% increase in quality factor compared to conventional copper-based spiral inductors at high frequencies.
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关键词
q-factor,ferromagnetic materials,inductors,magnetic permeability,skin effect,alternating copper,effective permeability,ferromagnetic antiresonance frequency,ferromagnetic film,high-quality integrated inductor,multilayered meta-conductor,quality factor,skin effect suppression,ferromagnetic resonance (fmr),inductor,magnetic thin film,radio frequency (rf),conductors,resistance,q factor,copper,radio frequency
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