A comparison of approaches for ultra-low-loss waveguides

Jared F Bauters,M Heck,Demis D John,J S Barton,Daniel J Blumenthal,John E Bowers,Christiaan M Bruinink,Arne Leinse,R G Heideman

Optical Fiber Communication Conference and Exposition（2012）

Cited 25|Views21

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Abstract

We compare ultra-low-loss silica waveguides with PECVD SiO2, borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.

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Key words

borosilicate glasses,claddings,optical glass,optical losses,optical planar waveguides,phosphosilicate glasses,plasma cvd,silicon compounds,wafer bonding,bpsg,pecvd,borophosphosilicate glass,planar waveguides,propagation loss,thermal oxide upper claddings,ultralow-loss silica waveguides,absorption,thermal stress,stress,optical waveguide,optical waveguides,scattering

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