Fabrication and properties of nano scale anti-static film by multilayered surface treatment

Jaimoo Yoo,Kiho Yeo, Jongchul Moon,Jisung So, Namwoog Kim,Sunghwan Lim, Youngha Jun

Nanotechnology Materials and Devices Conference（2011）

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摘要

In this work, we fabricated multilayer type anti-static film including few nano scale thickness of hydrogenated amorphous carbon (DLC) layer and metallic conductive layer, by hybrid coating system which is comprised of linear ion gun and magnetron sputter. Surface resistance can be controllable in the range of 103 ~ 1010Ω by controlling the thickness. With the benefit of few nano scale coating, this technique can have the maximum processing speed and save raw coating materials, compared to conventional coating method for processing anti-static film. Also discussed are the microstructural aspects of this newly developed anti-static film.

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关键词

amorphous state,coatings,diamond-like carbon,metallic thin films,multilayers,nanofabrication,nanostructured materials,sputter deposition,sputtered coatings,surface resistance,titanium,c-ti,hybrid coating system,hydrogenated amorphous carbon layer,linear ion gun,magnetron sputter,metallic conductive layer,microstructural aspect,multilayer type antistatic film,multilayered surface treatment,nanoscale antistatic film,nanoscale coating,nanoscale thickness,diamond like carbon,amorphous carbon,magnetron sputtering,microstructures

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