Defect Formation in Silicon During Laser Doping

Laser doping in industrial crystalline solar cells creates a selective emitter and thereby enhances the efficiency. Nevertheless, if not done carefully, the irradiation of the semiconductor introduces defects. We have suppressed defect formation by using a laser beam that is focused to a line with a width of only several micrometers. The maximal line width for a defect free recrystallization, howe...