2 N Period submicron grating at the inner wall of a metal cylinder

The aim of the present contribution is to set up and demonstrate the chain of processes leading to the Ni-master of a circular cylinder having an integer number of long grating lines of submicron period at its wall. Microelectronics 2D microstructuring technologies were adapted in order to print a photoresist integer period number on a glass cylinder flank by the projection of a radial planar phase-mask grating. The next step is the galvanic growth of nickel on the photoresist corrugation. Subsequently, the manufacturing of cylindrical gratings will be enabled by an injection moulding process.