Fabrication And Investigation Of Photonic Crystal Device With Mems Activated Defects Insertion

Monica Taysing-Lara,Gerard Dang,Stefan Svensson,Weimin Zhou

San Jose, CA（2008）

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摘要

A GaAs/AlGaAs-based photonic-crystal device with MEMS activated insertion/removal of defect posts into/from sub-micron photonic-crystal holes has been fabricated and investigated. This allows the device to actively create/remove point resonators or waveguides in the photonic-crystal membrane. (C) 2008 Optical Society of America

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关键词

iii-v semiconductors,aluminium compounds,crystal defects,gallium arsenide,membranes,micro-optomechanical devices,optical fabrication,optical materials,optical resonators,optical waveguides,photonic crystals,gaas-algaas,mems activated defects insertion,defect posts,fabrication process,photonic crystal membrane,point resonators,(130.5296) photonics crystal waveguide,(230.4685) optical microelectromechanical device,fabrication,photonic crystal,hafnium,etching

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