Laser Scattering Microhaze Correlation with Polysilicon Surface Roughness and Impact on Electrical Performance
IEEE International Symposium on Semiconductor Manufacturing conference proceedings（2006）
关键词
CMOS integrated circuits,laser beam applications,semiconductor lasers,silicon,surface roughness,thin films,CMOS process,Si,electrical performance,laser scattering,microhaze correlation,polysilicon films,process tool monitoring,size 45 nm,surface maps,surface roughness,wafer surface information
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