Residual donors in undoped LEC InP
Canberra, ACT（2000）
Abstract
Undoped liquid encapsulated Czochralski (LEC) InP samples have been studied by Hall effect, glow discharge mass spectroscopy (GDMS) and infrared absorption spectroscopy. A systematic discrepancy has been found between the Hall electron concentration and net donor concentration measured by GDMS. The electron concentration is always higher than the net shallow donor concentration by about (3-6)×10 15 cm-3. A hydrogen indium vacancy complex donor defect VInH4 was detected regularly by infrared absorption spectroscopy in all undoped LEC InP samples. The fact can be explained by taking into account the existence of the donor defect in as-grown undoped LEC-InP
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Key words
hall effect,iii-v semiconductors,defect absorption spectra,doping profiles,electron density,indium compounds,infrared spectra,vacancies (crystal),gdms,hall electron concentration,inp,donor defect,glow discharge mass spectroscopy,hydrogen indium vacancy complex donor defect,infrared absorption spectroscopy,residual donors,shallow donor concentration,undoped lec inp,undoped liquid encapsulated czochralski inp,electrons,impurities,mass spectroscopy,raw materials
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