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A Novel Self-Aligned Substrate-Diode Structure for SOI Technologies

M.M. Pelella,G. Burbach,A. Salman,S. Beebe,D. Chan, J. Buller

2005 IEEE International SOI Conference Proceedings（2005）

Cited 7|Views3
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Abstract
In this work, we describe novel self-aligned diode and resistor structures and their process integration into an advanced 90nm SOI technology. Their superior device characteristics over conventional device structures built within the SOI film is described.
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