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Laser Direct Write Compensation of Reflective Array Compressors

Denver, Colorado, USA(1987)

Cited 6|Views2
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Abstract
plied to trim frequency response characteristics of reflective-array compressors (RACs) on YZ-LiNb03. Two separate laser-activated microchemical processes define separate correction patterns on featureless thin-film strips of MO and Cr/CrpO3 cermet contained between RAC gratings. developed microchemical process in an 02 atmosphere has been used to provide a suitable amplitude trimming capability. A process previously reported by us is retained to remove MO in a C12 atmosphere for phase trimming. for high-resolution trimming are obtained by deconvolving the effects of the grating kernel function from the measured frequency-domain response. Several RAC models of varying complexity exist from which the required kernel function can be determined. Results will be discussed of a sequence of experiments
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Key words
ceramics,atmosphere,error correction,compressors,photochemistry,kernel
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