Visualization Of In- And Out-Of-Plane Vibrations In A Micromechanical Rf-Resonator

O Holmgren,K Kokkonen,T Mattila,V Kaajakari,A Oja,J Kiihamaki,Jv Knuuttila,Mm Salomaa

Ultrasonics Symposium, 2004 IEEE（2004）

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摘要

Vibrations in a micromeclumical 13.1 MHz, bulk acoustic acoustic mode silicon resonator are imaged utilizing a scanning Michelson laser interferometer. A novel detection scheme for our interferometer is discovered, enabling imaging of the in-plane plane vibrations in addition to the out-of-plane component of the vibrations. We are able to measure the in- and out-of-plane oscillations of the silicon resonator at the resonance frequencies of the square-extensional and Lame modes. The measured results are compared with FEM simulations. In addition, undesirable parasitic vibrations in the electrode regions are observed.

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关键词

Michelson interferometers,measurement by laser beam,micromechanical resonators,silicon,test equipment,vibrations,13.1 MHz,FEM,Lame mode,Si,bulk acoustic mode silicon resonator,in-plane vibration visualization,micromechanical RF-resonator,out-of-plane vibration visualization,parasitic vibrations,scanning Michelson laser interferometer,square-extensional mode,vibration imaging,

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