Design and fabrication of a reconfigurable photonic bandgap waveguide device with MEMS features
CLEO). Conference（2004）
摘要
We report on our efforts to develop a semiconductor based photonic bandgap device with MEMS features that is designed to reconfigure the photonic crystal structure into different types of waveguide devices such as switches, modulators, etc.
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关键词
micro-optics,micromechanical devices,optical design techniques,optical fabrication,optical waveguides,photonic band gap,photonic crystals,mems,photonic crystal structure,reconfigurable photonic bandgap waveguide,etching,gallium arsenide,photonic crystal
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