Ultra-thin chip with permalloy film for high performance MS/RF CMOS
2004 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS(2004)
Abstract
In this paper, we describe the high analog performance of MOSFETs and inductors on 1.7μm ultra-thin chip with permalloy film.
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Key words
cmos integrated circuits,mosfet,permalloy,inductors,integrated circuit noise,1.7 micron,mosfets,high performance ms/rf cmos,permalloy film,ultra-thin chip,fabrication,chip,packaging,noise measurement,noise figure,radio frequency
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