45Nm Node Planar-Soi Technology with 0.296 /spl Mu/m/sup 2/ 6T-SRAM Cell
2004 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS(2004)
Key words
MOSFET,SRAM chips,semiconductor device noise,silicon-on-insulator,0.296 μm2 6T-SRAM cell,0.6 V,120 mV,130 nm,140 nm,45 nm,45nm node planar-SOI technology,N-FET,P-FET
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