Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
Applied Mathematics and Computation(2004)
摘要
This paper presents a friction model-based ultra-precision stage control that introduces the non-resonant ultrasonic motor (NRUSM). At first, the friction characteristic is experimentally evaluated as a function of the stage position. Next, the friction model is adopted for the proposed continuous-pass tracking control design, and then the efficiency of the model-based control is verified by positioning experiments. Finally, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed.
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关键词
pi control,control system synthesis,position control,stiction,ultrasonic motors,continuous pass tracking control design,friction model,model based control,nonresonant ultrasonic motor,online identification method,static friction characteristics,ultra precision stage control,control systems,ultrasonic motor,electromagnetic forces,rough surfaces,friction,control system,surface roughness
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