Phase-Sensitive Absolute-Amplitude Measurements Of Surface Waves Using Heterodyne Interferometry
Ultrasonics, 2003 IEEE Symposium（2003）
Abstract
We describe a novel heterodyne interferometer for scanning surface-acoustic waves at high frequencies, up to 6 GHz. The heterodyne operation facilitates the measurement of the absolute amplitude of the surface waves without calibration. It simultaneously also enables measuring the phase. The amplitude and phase information allows precise characterization of the surface-acoustic waves. Moreover, the wave motion can be visualized in the form of animations to gain insight. The interferometer has been tested by measuring a 167 MHz SPUDT device and a 374 MHz fan-shaped SAW filter.
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Key words
acoustic variables measurement,acoustic wave interferometers,acoustic wave interferometry,phase measurement,surface acoustic waves,167 MHz,364 MHz,SAW filter,SPUDT device,absolute-amplitude measurements,heterodyne interferometer,heterodyne interferometry,phase information,phase-sensitive measurements,surface acoustic waves,surface waves,wave motion,
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