Silicon diffractive microlens for compact laser modules

Masahiro Uekawa,Ryo Sekikawa,Daisuke Shimura,Kyoko Kotani,Yoshinori Maeno,Hironori Sasaki,Takeshi Takamori

Tokyo, Japan（2003）

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Abstract

In this paper, we propose a silicon (Si) microlens and an ultra-compact optical sub-assembly (OSA) that consists of the Si microlens and a laser diode (LD) integrated on a Si V-groove substrate for a compact laser module.

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Key words

elemental semiconductors,integrated optics,microlenses,modules,semiconductor lasers,silicon,ld,si,compact laser modules,laser diode,silicon diffractive microlens,ultra-compact optical sub-assembly

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