Ti(Ta)O/sub 2/ film fabricated by magnetron sputtering and plasma immersion ion implantation and deposition: comparative study

Jeju, South Korea(2003)

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Abstract
Summary form only given, as follows. High performance hemocompatible materials have become the subject of increasing research in recent years. Specific kinds of surface modification are being developed as increasingly effective methods for improving the multi-functionality of devices, while obviating the need for high cost and long development times. As an effective method, plasma-based deposition of thin film materials has been applied to modify existing metallic biomaterials such as stainless steel, cobalt alloy and titanium, which have been applied as substrate materials for stents and mechanical heart valves, etc. The work described focuses on the comparison of the characteristics and properties of a new doped titanium dioxide film deposited using two different plasma-based deposition methods.
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Key words
biomedical materials,plasma immersion ion implantation,sputtered coatings,tantalum,titanium compounds,ti(ta)o/sub 2/ film,tio/sub 2/:ta,cobalt alloy,hemocompatible materials,magnetron sputtering,metallic biomaterials,plasma-based deposition methods,stainless steel,thin film materials,titanium,sputtering,thin film,surface modification,comparative study
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