Energy spread measurement of electrons from field emitter array for ion beam neutralization

Jun Ishikawa,Yukiko Gotoh,Koji Nakamura,Hiroshi Tsuji,Kazuhiko Matsuda,Nobuo Nagai,Shinsuke Sakai,Tadashi Ikejiri,Sei Umisedo,Nariaki Hamamoto

Osaka, Japan（2003）

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摘要

In this paper, the use of a field emitter array as an electron source for the charge neutralization of ion beam was proposed. Si was preferred as an emitter material because minimum contamination was expected for the preparation of silicon devices such as LSI. The energy spread of the extracted electrons from electron source were measured.

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关键词

electron sources,elemental semiconductors,field emitter arrays,semiconductor devices,silicon,lsi,si,charge neutralization,electron source,electrons energy spread measurement,field emitter array,ion beam neutralization,silicon devices,contamination,ion beam,electron emission

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