Field modulation micro coils for magneto-optical recording
Amsterdam, The Netherlands（2002）
Abstract
Summary form only given. A magnetic field modulation (MFM) coil with a magnetic core is described for advanced magneto-optical recording technologies of 50-100 Gb/in/sup 2/. This MFM coil is fabricated on a Si substrate by thin film process technologies for Si etching and the magnetic multilayered core. Three holes are chemically etched in the Si substrate as contact holes and laser light hole. The magnetic core, consisting of a CoFeSiB/SiO/sub 2/ composite multi-layered film, is applicable to MFM coils.
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Key words
coils,etching,magnetic cores,magnetic multilayers,magneto-optical modulation,magneto-optical recording,cofesib-sio/sub 2/,cofesib/sio/sub 2/ composite multi-layered magnetic core,mfm coil,si,si etching,si substrate,chemically etched contact holes,chemically etched laser light hole,field modulation micro coils,magnetic core,magnetic field modulation coil,magneto-optical recording technology,thin film technologies,magnetic field,thin film
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