Null Detector and AC Voltage Reference Based on MEMS

Manninen, A.J.,Helisto, P.,Sipola, H.,Roschier, L.

Precision Electromagnetic Measurements（2014）

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capacitors,electric current measurement,microsensors,reference circuits,voltage measurement,voltmeters,MEMS,microelectromechanical system,moving-plate capacitor,null detector,pull-in effect,stand-alone AC voltage reference,voltmeter,Microelectromechanical systems (MEMS),null detector,voltage measurement,voltage reference

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